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1

Germanium Incorporation in Silicon Carbide Epitaxial Layers Using Molecular Beam Epitaxy on 4H-SiC Substrates

Pezoldt, Jörg, Zgheib, Charbel, Stauden, Thomas, Ecke, Gernot, Kups, Thomas, Jacobs, Heiko O., Weih, Petia

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 1.05 MB

2019

2

AlGaN/GaN Based HEMTs on SiC/Si-Substrates: Influences on High Frequency Performance

Jatal, Wael, Tonisch, Katja, Baumann, Uwe, Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 274 KB

english, 2013

3

Side Gate Graphene and AlGaN/GaN Unipolar Nanoelectronic Devices

Göckeritz, Robert, Tonisch, Katja, Jatal, Wael, Hiller, Lars, Schwierz, Frank, Pezoldt, Jörg

Journal:

Advanced Materials Research

Year:

2011

Language:

english

File:

PDF, 1.10 MB

english, 2011

4

High Dose High Temperature Ion Implantation of Ge into 4H-SiC

Kups, Thomas, Weih, Petia, Voelskow, M., Skorupa, Wolfgang, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2006

Language:

english

File:

PDF, 14.73 MB

english, 2006

5

Mechanical Properties of Cubic SiC, GaN and AlN Thin Films

Pezoldt, Jörg, Grieseler, Rolf, Schupp, Thorsten, As, Donat J., Schaaf, Peter

Journal:

Materials Science Forum

Year:

2012

Language:

english

File:

PDF, 330 KB

english, 2012

6

SiC Polytype Stability Influenced by Ge Impurities

Nader, R., Kazan, Michel, Moussaed, E., Zgheib, Charbel, Nsouli, B., Pezoldt, Jörg, Masri, Pierre M.

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 291 KB

english, 2009

7

Performance Modification of SiC MEMS

Niebelschütz, Florentina, Brückner, Klemens, Cimalla, Volker, Hein, Matthias A., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 1.94 MB

english, 2009

8

Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests

Grieseler, Rolf, Theska, Felix, Stürzel, Thomas, Hähnlein, Bernd, Stubenrauch, Mike, Hopfeld, Marcus, Kups, Thomas, Pezoldt, Jörg, Schaaf, Peter

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 995 KB

english, 2016

9

Tri-Gate Al0.2Ga0.8N/AlN/GaN HEMTs on SiC/Si-Substrates

Jatal, Wael, Baumann, Uwe, Jacobs, Heiko O., Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2016

Language:

english

File:

PDF, 511 KB

english, 2016

10

Defects and Polytype Instabilities

Pezoldt, Jörg, Kalnin, Andrei Alexandrovich

Journal:

Materials Science Forum

Year:

2018

Language:

english

File:

PDF, 1.54 MB

english, 2018

11

Atomic force microscopy investigations of rapid thermal carbonized silicon

Henry Romanus, Volker Cimalla, Alexander Kromka, Jörg Scheiner, Lothar Spieβ, Jörg Pezoldt

Journal:

Materials Science and Engineering: B

Year:

1997

Language:

english

File:

PDF, 505 KB

english, 1997

12

Stress and stress monitoring in SiC–Si heterostructures

Jörg Pezoldt, Richard Nader, Florentina Niebelschütz, Volker Cimalla, Thomas Stauden, Charbel Zgheib, Pierre Masri

Journal:

physica status solidi (a)

Year:

2008

Language:

english

File:

PDF, 287 KB

english, 2008

13

Ambient and temperature dependent electric properties of backgate graphene transistors

Christian Hummel, Frank Schwierz, Antonia Hanisch, Jörg Pezoldt

Journal:

physica status solidi (b)

Year:

2010

Language:

english

File:

PDF, 175 KB

english, 2010

14

Designing the Si(100) conversion into SiC(100) by Ge

Richard Nader, Florentina Niebelschütz, Dmitri V. Kulikov, Vladimir V. Kharlamov, Yurii V. Trushin, Pierre Masri, Jörg Pezoldt

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 144 KB

english, 2010

15

Top gated graphene transistors with different gate insulators

Jörg Pezoldt, Christian Hummel, Antonia Hanisch, Ivan Hotovy, Magdalena Kadlecikova, Frank Schwierz

Journal:

physica status solidi (c)

Year:

2010

Language:

english

File:

PDF, 273 KB

english, 2010

16

Black luminescent silicon

Jörg Pezoldt, Thomas Kups, Mike Stubenrauch, Michael Fischer

Journal:

physica status solidi (c)

Year:

2011

Language:

english

File:

PDF, 621 KB

english, 2011

17

Spectroscopic investigations of the role of Ge in modifying the Si to SiC conversion process

Jörg Pezoldt, Richard Nader, Charbel Zgheib, Gernot Ecke, Ralph Pieterwas, Thomas Stauden, Thomas Wöhner, Pierre Masri

Journal:

Surface and Interface Analysis

Year:

2008

Language:

english

File:

PDF, 164 KB

english, 2008

18

Surface morphology of Ge-modified 3C-SiC/Si films

Richard Nader, Michel Kazan, Elie Moussaed, Thomas Stauden, Merten Niebelschütz, Pierre Masri, Jörg Pezoldt

Journal:

Surface and Interface Analysis

Year:

2008

Language:

english

File:

PDF, 292 KB

english, 2008

19

Interpretation of Auger depth profiles of thin SiC layers on Si

Gernot Ecke, Hans Rößler, Volker Cimalla, Jörg Pezoldt

Journal:

Microchimica Acta

Year:

1997

Language:

english

File:

PDF, 321 KB

english, 1997

20

Polarity determination and control of SiC grown on Si

Jörg Pezoldt, Thomas Kups, Thomas Stauden, Bernd Schröter

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 522 KB

english, 2009

21

Controlled localised melting in silicon by high dose germanium implantation and flash lamp annealing

Matthias Voelskow, Wolfgang Skorupa, Jörg Pezoldt, Thomas Kups

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2009

Language:

english

File:

PDF, 387 KB

english, 2009

22

Epitaxial graphene three-terminal junctions

Gockeritz, Robert, Pezoldt, Jorg, Schwierz, Frank

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 724 KB

english, 2011

23

The estimation of sputtering yields for SiC and Si

Gernot Ecke, Rastislav Kosiba, Vladimir Kharlamov, Yuri Trushin, Jörg Pezoldt

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2002

Language:

english

File:

PDF, 226 KB

english, 2002

24

RTP — temperature monitoring by means of oxidation

Jens-Peter Zöllner, Volker Cimalla, Jörg Pezoldt

Journal:

Journal of Non-Crystalline Solids

Year:

1995

Language:

english

File:

PDF, 282 KB

english, 1995

25

2H-AlGaN/GaN HEMTs on 3C-SiC(111)/Si(111) Substrates

Tonisch, Katja, Jatal, Wael, Granzner, Ralf, Kittler, Mario, Baumann, Uwe, Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 567 KB

english, 2010

26

Properties of Graphene Side Gate Transistors

Hähnlein, Bernd, Händel, Benjamin, Schwierz, Frank, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 343 KB

english, 2013

27

The Diffusion Coefficient of Silicon in Thin SiC Layers as a Criterion for the Quality of the Grown Layers

Cimalla, Volker, Wöhner, T., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 337 KB

english, 2000

28

Electrical Characterization of SiC/Si Heterostructures with Modified Interfaces

Förster, Christian, Masri, Pierre M., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2002

File:

PDF, 330 KB

2002

29

AlGaN/GaN Three-Terminal Junction Devices for Rectification and Transistor Applications on 3C-SiC/Si Pseudosubstrates

Hiller, Lars, Pezoldt, Jorg

Journal:

IEEE Transactions on Electron Devices

Year:

2013

Language:

english

File:

PDF, 607 KB

english, 2013

30

Isotropic Etching of SiC

Stauden, Thomas, Niebelschütz, Florentina, Tonisch, Katja, Cimalla, Volker, Ecke, Gernot, Haupt, Christian, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 580 KB

english, 2009

31

AlGaN based MEMS structures

Hähnlein, Bernd, Tonisch, Katja, Ecke, Gernot, Grieseler, Rolf, Michael, Steffen, Schaaf, Peter, Pezoldt, Jörg

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 389 KB

english, 2014

32

Table of Contents

Grieseler, Rolf, Hähnlein, Bernd, Stubenrauch, Mike, Kups, Thomas, Wilke, Marcus, Hopfeld, Marcus, Pezoldt, Jörg, Schaaf, Peter

Journal:

Surgical Clinics

Year:

2006

Language:

english

File:

PDF, 42 KB

english, 2006

33

Nanostructured plasma etched, magnetron sputtered nanolaminar Cr2AlC MAX phase thin films

Grieseler, Rolf, Hähnlein, Bernd, Stubenrauch, Mike, Kups, Thomas, Wilke, Marcus, Hopfeld, Marcus, Pezoldt, Jörg, Schaaf, Peter

Journal:

Applied Surface Science

Year:

2014

Language:

english

File:

PDF, 1.87 MB

english, 2014

34

Ge incorporation inside 4H-SiC during homoepitaxial growth by chemical vapor deposition

Alassaad, Kassem, Soulière, Véronique, Cauwet, François, Peyre, Hervé, Carole, Davy, Kwasnicki, Pawel, Juillaguet, Sandrine, Kups, Thomas, Pezoldt, Jörg, Ferro, Gabriel

Journal:

Acta Materialia

Year:

2014

Language:

english

File:

PDF, 1.44 MB

english, 2014

35

[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Device concepts using two-dimensional electronic materials: Graphene, MoS2, etc

Schwierz, Frank, Pezoldt, Jorg

Year:

2012

Language:

english

File:

PDF, 283 KB

english, 2012

36

Size effect of Young's modulus in AlN thin layers

Hähnlein, Bernd, Schaaf, Peter, Pezoldt, Jörg

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.18 MB

english, 2014

37

Localized Collection of Airborne Analytes: A Transport Driven Approach to Improve the Response Time of Existing Gas Sensor Designs

Fang, Jun, Park, Se-Chul, Schlag, Leslie, Stauden, Thomas, Pezoldt, Jörg, Jacobs, Heiko O.

Journal:

Advanced Functional Materials

Year:

2014

Language:

english

File:

PDF, 1.40 MB

english, 2014

38

High-Frequency Performance of GaN High-Electron Mobility Transistors on 3C-SiC/Si Substrates With Au-Free Ohmic Contacts

Jatal, Wael, Baumann, Uwe, Tonisch, Katja, Schwierz, Frank, Pezoldt, Jorg

Journal:

IEEE Electron Device Letters

Year:

2015

Language:

english

File:

PDF, 253 KB

english, 2015

39

SiC/Si Pseudosubstrates for AlGaN Nanoelectronic Devices

Hiller, Lars, Tonisch, Katja, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2013

Language:

english

File:

PDF, 670 KB

english, 2013

40

The Measurement of the Thickness of Thin SiC Layers on Silicon

Cimalla, Volker, Scheiner, J., Ecke, Gernot, Friedrich, M., Goldhahn, R., Zahn, D.R.T., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

1998

File:

PDF, 328 KB

1998

41

In Situ Monitoring of the Effect of Ge on the SiC Growth on (111)Si Surfaces

Wöhner, T., Stauden, Thomas, Schaefer, J.A., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 406 KB

english, 2000

42

The Influence of Ge on the SiC Nucleation on (111)Si Surfaces

Pezoldt, Jörg, Wöhner, T., Stauden, Thomas, Schaefer, J.A., Vida, György

Journal:

Materials Science Forum

Year:

2001

File:

PDF, 361 KB

2001

43

Low Temperature Chemical Vapor Deposition of 3C-SiC on Si Substrates

Förster, Christian, Cimalla, Volker, Ambacher, Oliver, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 676 KB

english, 2005

44

Property Modification of 3C-SiC MEMS on Ge-Modified Si(100) Substrates

Niebelschütz, Florentina, Zhao, Wei Hong, Brueckner, Klemens, Tonisch, Katja, Linß, Matthias, Hein, Matthias A., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2010

Language:

english

File:

PDF, 474 KB

english, 2010

45

Infrared Gratings Based on SiC/Si-Heterostructures

Rockstuhl, Carsten, Herzig, H.P., Förster, Christian, Leycuras, André, Ambacher, Oliver, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2005

Language:

english

File:

PDF, 796 KB

english, 2005

46

Structural Investigations of the Nucleation and Growth of SiC during Rapid Thermal Conversion of (111)Si

Cimalla, Volker, Attenberger, W., Lindner, J.K.N., Stritzker, B., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 421 KB

english, 2000

47

Silicon Carbide Buffer Layers for Nitride Growth on Si

Masri, Pierre M., Herro, Z.G., Stauden, Thomas, Pezoldt, Jörg, Sumiya, M., Averous, M.

Journal:

Materials Science Forum

Year:

2002

File:

PDF, 336 KB

2002

48

Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification

Pezoldt, Jörg, Morales, Francisco M., Stauden, Thomas, Förster, Christian, Polychroniadis, E.K., Stoemenos, J., Panknin, D., Skorupa, Wolfgang

Journal:

Materials Science Forum

Year:

2006

Language:

english

File:

PDF, 667 KB

english, 2006

49

Flash Lamp Supported Deposition of 3C-SiC (FLASiC) – a Promising Technique to Produce High Quality Cubic SiC Layers

Skorupa, Wolfgang, Panknin, D., Anwand, W., Voelskow, M., Ferro, Gabriel, Monteil, Yves, Leycuras, André, Pezoldt, Jörg, McMahon, R.A., Smith, M., Camassel, Jean, Stoemenos, J., Polychroniadis, E.K.,

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 1.00 MB

english, 2004

50

T- and Y-Branched Three-Terminal Junction Graphene Devices

Pezoldt, Jörg, Göckeritz, Robert, Hähnlein, Bernd, Händel, Benjamin, Schwierz, Frank

Journal:

Materials Science Forum

Year:

2012

Language:

english

File:

PDF, 1000 KB

english, 2012

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